Technology and equipment for production of electronic materials and devices

code 2.2.3. • before 2022: 05.27.06 “Technology and equipment for production of semiconductors, electronic materials and devices”

1. Track-etched membranes: theory, experiment, fundamentals of the technology of industrial production, application

   Shestakov, Vladimir Dmitrievich · 1995 · Doctor of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
2. Development of efficient semiconductor thermoelements based on A^V B^VI and A^IV B^VI compounds and technological methods for their production

   Polistanskiy, Yu. G. · 1994 · Doctor of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
3. Physicochemical aspects of the environmental support of the technology of dynamic plasma treatment of a solid surface

   Andreeva, M. Yu. · 1994 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
4. Improving the effectiveness of personnel and environmental protection during vacuum-plasma etching of functional layers in integrated circuit production

   Trubin, Igor Sergeevich · 1994 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
5. Synthesis of dielectric multicomponent materials in high-frequency plasma and study of their properties

   Timoshenkov, S. P. · 1994 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
6. Development of physicochemical bases for the production of five-component InAlGaAsSb solid solutions in a temperature gradient field

   Ovchinnikov, Vadim Alekseevich · 1994 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
7. Effect of the interaction of impurities and defects on gettering processes in silicon for planar technology

   Sergeeva, Zhanna Mikhailovna · 1994 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
8. Physical and technological fundamentals of the development of efficient metal-alloy and metal-oxide cathode materials and cathodes based on them for high-power vacuum electronic devices

   Esaulov, Nikolay Petrovich · 1994 · Doctor of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
9. Synthesis and luminescence of doped silicon nitride

   Chernovets, Boris Vasilyevich · 1993 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
10. Physico-technological fundamentals of ion-plasma etching of silicon carbide

    Zhang, Hai-Yin · 1993 · Candidate of Sciences

    • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
11. Effect of isovalent impurities on the structure and properties of AIIIBV semiconductors under liquid-phase epitaxy conditions

    Akchurin, R. Kh. · 1993 · Doctor of Sciences

    • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
12. The use of ion-electron emission for monitoring ion-beam etching processes of film structures

    Zhuravlev, Andrey Valeryevich · 1993 · Candidate of Sciences

    • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
13. Development of heat-resistant metalloid-free amorphous alloys based on rhenium for electronic engineering

    Obvintsev, Yuri Alekseevich · 1992 · Candidate of Sciences

    • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
14. Development and investigation of optimal regimes for single-crystal growth of aluminum nitride

    Mel'nik, Yuriy Vladlenovich · 1992 · Candidate of Sciences

    • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
15. Study of the effect of a rare-earth impurity on the epitaxial growth process and the properties of epitaxial layers of CaSb and CaAs

    Pak, Cher · 1992 · Candidate of Sciences

    • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
16. Development and optimization of the manufacturing technology for multilevel interconnection boards on large-size substrates

    Zaidman, Sergei Aleksandrovich · 1992 · Candidate of Sciences

    • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
17. Development and study of the technology for depositing multicomponent vitreous films by RF bias magnetron sputtering for 4th- and 5th-generation BGIS APOI

    Perelygin, Igor Zakharovich · 1992 · Candidate of Sciences

    • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
18. Synthesis and properties of sillenite crystals and films containing ions of transition elements Cr3+, Fe3+, Co3+, Ni2+

    Kuchuk, Zhanna Semyonovna · 1991 · Candidate of Sciences

    • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices