Technology and equipment for production of electronic materials and devices

code 2.2.3. • before 2022: 05.27.06 “Technology and equipment for production of semiconductors, electronic materials and devices”

1. Substantiation and development of a method for precision chemical-mechanical polishing of large-diameter silicon wafers for submicron-level VLSI

   Chukanov, Sergey Vladimirovich · 1998 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
2. Effect of a third component on the distribution of defects and impurities in dislocation-free silicon single crystals for integrated circuits

   Makeyev, Marat Khasanovich · 1998 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
3. Temperature-gradient zone recrystallization in the silicon-germanium system

   Kukoz, Viktor Fedorovich · 1998 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
4. Development and implementation of semiconductor materials with special properties for electronic devices and the industrial technology for their production

   Furmanov, Gennadiy Petrovich · 1998 · Doctor of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
5. Microstructural inhomogeneity and thermal stability of a-Si:H films and alloys based on it

   Sazonov, Andrey Yuryevich · 1997 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
6. Development and investigation of materials and technology for multilayer metal-dielectric structures by diffusion welding

   Chilikina, Marina Valer'yevna · 1997 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
7. Investigation of the causes of defect formation in the production of silicon wafers

   Rachenkova, Anna Vitalyevna · 1997 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
8. Formation and investigation of the properties of thin tungsten films obtained by pulsed condensation of electroerosion plasma

   Roshchin, Vladimir Mikhailovich · 1997 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
9. Regularities of the pyrolysis of gallium and indium chloride ammines in the process of GaN and InN layer deposition

   Krasovitskiy, Dmitriy Mikhailovich · 1997 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
10. Development of the physicochemical fundamentals for producing multicomponent solid solutions based on InAs in a temperature gradient field

    Shevchenko, Andrey Gennad'yevich · 1996 · Candidate of Sciences

    • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
11. Experimental studies and numerical simulation of gas-dynamic flows in silicon gas-phase epitaxy processes

    Turilin, Sergei Mitrofanovich · 1996 · Candidate of Sciences

    • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
12. Solid-electrolyte sensor for halogen-containing substances with a sensitive layer of potassium-barium-gadolinium molybdate and an activated electrode

    Lebedeva, Tatyana Anatolyevna · 1996 · Candidate of Sciences

    • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
13. Thick YBa2Cu3O7-δ films on a Y2BaCuO5 substrate : Preparation, properties, applications

    Raspopina, Ekaterina Vladislavovna · 1996 · Candidate of Sciences

    • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
14. Development and investigation of a technology for fabricating "silicon-on-insulator" structures using selective chemical etching of silicon

    Semenov, Oleg Yuryevich · 1996 · Candidate of Sciences

    • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
15. Investigation of conditions and development of a technology for producing epitaxial structures of indium antimonide for multielement photodetectors

    Armyagova, Oksana Pavlovna · 1996 · Candidate of Sciences

    • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
16. Phase equilibria in the Ba–Cu–O system

    Skorobogatova, Olga Viktorovna · 1996 · Candidate of Sciences

    • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
17. Investigation and development of a manufacturing technology for thermally stable weakly penetrating contact systems of silicon integrated circuits

    Gromov, Dmitry Gennadyevich · 1996 · Candidate of Sciences

    • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
18. Investigation of plasma-chemical deposition processes of silicon nitride films

    Kovalgin, Aleksey Yuryevich · 1995 · Candidate of Sciences

    • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
19. Effect of synthesis and doping conditions on the luminescence and afterglow of ZrO2 Ti

    Trishkaneva, Marina Valeryevna · 1995 · Candidate of Sciences

    • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
20. Development and investigation of titanium sitall cements for thick-film electronics

    Repin, Vadim Anatolyevich · 1995 · Candidate of Sciences

    • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices