Technology and equipment for production of electronic materials and devices

code 2.2.3. • before 2022: 05.27.06 “Technology and equipment for production of semiconductors, electronic materials and devices”

1. Formation patterns and properties of heterostructures based on disordered semiconductors

   Sherchenkov, Aleksei Anatolievich · 2002 · Doctor of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
2. Improving the responsiveness of control of the technological process for producing the gate dielectric of MIS integrated circuits

   Chukhraev, Igor Vladimirovich · 2002 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
3. Substantiation and development of a precision method for double-sided free-abrasive grinding of large-diameter silicon wafers

   Yakovlev, Sergey Petrovich · 2001 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
4. Preparation and study of ceramic structures for metrological instruments

   Sharin, Andrey Gennadyevich · 2001 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
5. Solar cells based on hydrogenated amorphous silicon produced in a low-frequency glow discharge

   Chernomordik, Vladimir Dmitrievich · 2001 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
6. Preparation and study of the properties of nanoheterogeneous structures based on the tungsten-carbon system

   Chmyrova, Olga Leonidovna · 2001 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
7. Superconducting and ferroelectric perovskite film structures in microwave microelectronics

   Karmanenko, Sergei Fedorovich · 2001 · Doctor of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
8. Study of the effect of manufacturing inaccuracies on the additional aberrations of fast-response magnetic deflecting systems and quadrupole lenses

   Zotova, Milena Olegovna · 2001 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
9. Technological fundamentals of the development of composite secondary electron emitters for vacuum electronic devices

   Zhdanov, Sergey Mikhaylovich · 2001 · Doctor of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
10. Development of active and passive materials for nondestructive testing instruments for units and assemblies of nuclear power plants

    Mustafinov, Eduard Nikolaevich · 2000 · Candidate of Sciences

    • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
11. Study and development of heat treatment processes for semiconductor materials for special applications

    Shagarov, Boris Anatolyevich · 2000 · Candidate of Sciences

    • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
12. Structural and morphological features of aluminum nitride depending on preparation conditions

    Chetvergov, Mikhail Vladimirovich · 2000 · Candidate of Sciences

    • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
13. Development of information support for vacuum processes in the creation of film compositions

    Chikiryakin, Aleksey Anatolyevich · 2000 · Candidate of Sciences

    • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
14. Development of a production technology for silicon epitaxial structures for power devices

    Kharlamov, Roman Valentinovich · 2000 · Candidate of Sciences

    • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
15. Application of the crystal-chemical approach to the synthesis of compounds and solid solutions with the sillenite structure

    Tsareva, Svetlana Yuryevna · 1999 · Candidate of Sciences

    • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
16. Growth of single crystals and superionic conductivity of nonstoichiometric fluorides with the tysonite-type structure (LfF3)

    Fominykh, Maksim Valentinovich · 1999 · Candidate of Sciences

    • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
17. Development of integrated thermal sensors based on single-crystal silicon foil and study of their characteristics

    Zinovyev, Dmitry Valeryevich · 1999 · Candidate of Sciences

    • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
18. Development of a process for forming multiple quantum well structures for multielement infrared photodetectors by MOC hydride epitaxy

    Zalevsky, Igor Dmitrievich · 1999 · Candidate of Sciences

    • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
19. Effect of pulsed light exposure on the physical properties of near-surface layers of semiconductors

    Zhelezny, Sergey Vladimirovich · 1999 · Candidate of Sciences

    • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
20. Synthesis and investigation of glass-crystalline composite materials for electronic components

    Chasovnikova, Elena Vladimirovna · 1998 · Candidate of Sciences

    • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices