Technology and equipment for production of electronic materials and devices

code 2.2.3. • before 2022: 05.27.06 “Technology and equipment for production of semiconductors, electronic materials and devices”

1. Solar cells based on hydrogenated amorphous silicon produced in a low-frequency glow discharge

   Chernomordik, Vladimir Dmitrievich · 2001 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
2. Investigation of plasma-chemical deposition processes of silicon nitride films

   Kovalgin, Aleksey Yuryevich · 1995 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
3. The use of ion-electron emission for monitoring ion-beam etching processes of film structures

   Zhuravlev, Andrey Valeryevich · 1993 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
4. Development of heat-resistant metalloid-free amorphous alloys based on rhenium for electronic engineering

   Obvintsev, Yuri Alekseevich · 1992 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
5. Development and investigation of optimal regimes for single-crystal growth of aluminum nitride

   Mel'nik, Yuriy Vladlenovich · 1992 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
6. Study of the effect of a rare-earth impurity on the epitaxial growth process and the properties of epitaxial layers of CaSb and CaAs

   Pak, Cher · 1992 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
7. Development and optimization of the manufacturing technology for multilevel interconnection boards on large-size substrates

   Zaidman, Sergei Aleksandrovich · 1992 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
8. Development and study of the technology for depositing multicomponent vitreous films by RF bias magnetron sputtering for 4th- and 5th-generation BGIS APOI

   Perelygin, Igor Zakharovich · 1992 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
9. Synthesis and properties of sillenite crystals and films containing ions of transition elements Cr3+, Fe3+, Co3+, Ni2+

   Kuchuk, Zhanna Semyonovna · 1991 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices