Cover of the work “Physicochemical and technological fundamentals of obtaining polyimide structures for microelectronic devices, micromechanical devices and microsensor devices”. Author: Zhukov, Andrey Aleksandrovich. Degree: Doctor of Sciences. Year: 2003

Physicochemical and technological fundamentals of obtaining polyimide structures for microelectronic devices, micromechanical devices and microsensor devices

Moscow

315 pp.

Keywords

production of thin polyimide structures

Physicochemical and technological fundamentals of obtaining polyimide structures for microelectronic devices, micromechanical devices and microsensor devices — Zhukov, Andrey Aleksandrovich — 2003 — Russian Dissertation Library