Cover of the work “Calculation of technological regimes and selection of equipment parameters for the formation of island-type thin films in vacuum”. Author: Sidorova, Svetlana Vladimirovna. Degree: Candidate of Sciences. Year: 2016

Calculation of technological regimes and selection of equipment parameters for the formation of island-type thin films in vacuum

Bauman Moscow State Technical University, Moscow

193 pp.

Calculation of technological regimes and selection of equipment parameters for the formation of island-type thin films in vacuum — Sidorova, Svetlana Vladimirovna — 2016 — Russian Dissertation Library