The use of ion-electron emission for monitoring ion-beam etching processes of film structures

More works in this specialty

1. Development of the molecular layering method for the synthesis of ultrathin films of metal chalcogenides

   Zheleznyakova, Anastasiya Vyacheslavovna · 2007 · Candidate of Sciences · Moscow State Institute of Electronic Technology

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
2. Solar cells based on hydrogenated amorphous silicon produced in a low-frequency glow discharge

   Chernomordik, Vladimir Dmitrievich · 2001 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
3. Investigation of plasma-chemical deposition processes of silicon nitride films

   Kovalgin, Aleksey Yuryevich · 1995 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
4. Development of heat-resistant metalloid-free amorphous alloys based on rhenium for electronic engineering

   Obvintsev, Yuri Alekseevich · 1992 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
5. Development and investigation of optimal regimes for single-crystal growth of aluminum nitride

   Mel'nik, Yuriy Vladlenovich · 1992 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices

All works in this specialty