Effect of the interaction of impurities and defects on gettering processes in silicon for planar technology

More works in this specialty

1. Development of the molecular layering method for the synthesis of ultrathin films of metal chalcogenides

   Zheleznyakova, Anastasiya Vyacheslavovna · 2007 · Candidate of Sciences · Moscow State Institute of Electronic Technology

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
2. Solar cells based on hydrogenated amorphous silicon produced in a low-frequency glow discharge

   Chernomordik, Vladimir Dmitrievich · 2001 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
3. Development and investigation of materials and technology for multilayer metal-dielectric structures by diffusion welding

   Chilikina, Marina Valer'yevna · 1997 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
4. Investigation of the causes of defect formation in the production of silicon wafers

   Rachenkova, Anna Vitalyevna · 1997 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices
5. Formation and investigation of the properties of thin tungsten films obtained by pulsed condensation of electroerosion plasma

   Roshchin, Vladimir Mikhailovich · 1997 · Candidate of Sciences

   • 05.27.06 Technology and equipment for production of semiconductors, electronic materials and devices

All works in this specialty