Electronic component base of micro- and nanoelectronics, quantum devices

code 2.2.2. • before 2022: 05.27.01 “Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices”; 05.27.03 “Quantum electronics”

1. Optimization of magnetron deposition regimes of metal oxide films for functional microelectronics devices

   Fartushnaya, Vera Mikhailovna · 1996 · Candidate of Sciences

   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
2. Synthesis of optimal masks for X-ray lithography in synchrotron radiation beams

   Filatova, Margarita Sergeyevna · 1996 · Candidate of Sciences

   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
3. Investigation of the specific features of the effect of low-energy electrons on polymer resists in microstructuring processes

   Borzenko, Tatyana Borisovna · 1996 · Candidate of Sciences

   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
4. Methods for ensuring the reliability of microelectronic products based on the principles of quality control theory

   Rubanik, Yuri Timofeyevich · 1996 · Doctor of Sciences

   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
5. Investigation and development of processes for forming non-penetrating ohmic contacts based on titanium silicide to shallow p-n junctions of silicon integrated circuits

   Rainova, Maria Yuryevna · 1996 · Candidate of Sciences

   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
6. Generation and control of the parameters of electromagnetic radiation in nonstationary and inhomogeneous media

   Romanov, Igor Vladimirovich · 1996 · Candidate of Sciences

   • 05.27.03 Quantum electronics
7. Lasers without population inversion

   Kocharovskaya, Olga Anatolyevna · 1996 · Doctor of Sciences

   • 05.27.03 Quantum electronics
8. Study of the near-surface layers of silicon implanted with high doses of carbon by means of IR spectroscopy

   Zharikov, Sagindyk Kiyakbayevich · 1996 · Candidate of Sciences

   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
9. Study of pulsed operating modes of the CO2 laser as applied to laser surgery

   Nguyen Van Dong · 1996 · Candidate of Sciences

   • 05.27.03 Quantum electronics
10. Scanning electron microscopy of multilayer structures in backscattered electrons

    Dremova, Nadezhda Nikolaevna · 1996 · Candidate of Sciences

    • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
11. Investigation of the conductivity switching characteristics of film HTS elements with current and optical control

    Vaskevich, Yan · 1995 · Candidate of Sciences

    • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
12. Investigation of design and technological methods for the creation and development of high-power, high-efficiency, reliable silicon avalanche transit-time diodes of the millimeter wave range

    Shukhostanov, Amdulkhamid Kistuyevich · 1995 · Doctor of Sciences

    • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
13. Silicon microelectronic sensors based on the CMOS design-and-technology platform

    Chaplygin, Yuriy Aleksandrovich · 1995 · Doctor of Sciences

    • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
14. Development of acoustic microscopy methods for studying the structure and properties of solid-state materials

    Zhang, Sungen · 1995 · Candidate of Sciences

    • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
15. Direct and inverse problems in the analysis of profiled surfaces in the mode of backscattered electron registration

    Firsova, Alisa Anatolyevna · 1995 · Candidate of Sciences

    • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
16. Magneto-optical method for metrological control of products and its application in solid-state device technology

    Toropov, Andrey Yuryevich · 1995 · Candidate of Sciences

    • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
17. Technological processes of the planar cycle in serial production of liquid-crystal indicators

    Reshetnikov, Boris Konstantinovich · 1995 · Candidate of Sciences

    • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
18. Study of temperature fields, stresses, and defect formation in silicon IC structures during rapid thermal processing with incoherent radiation

    Ageev, Oleg Alekseevich · 1995 · Candidate of Sciences

    • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
19. Theoretical and experimental investigation of the thermal oxidation process of silicon structures

    Zlotnikova, Irina Yakovlevna · 1995 · Candidate of Sciences

    • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
20. Method of long-period standing X-ray waves for the characterization of layered nanostructures

    Zheludeva, Svetlana Ivanovna · 1995 · Doctor of Sciences

    • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices