Electronic component base of micro- and nanoelectronics, quantum devices

code 2.2.2. • before 2022: 05.27.01 “Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices”; 05.27.03 “Quantum electronics”

1. Environmentally safe plasma etching of silicon and silicon-containing materials for the formation of elements of large-scale integrated circuits (LSI)

   Rybachek, Yelena Nikolaevna · 1998 · Candidate of Sciences

   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
2. Phase-sensitive electron transport in hybrid metallic nanostructures

   Shaykhaydarov, Rais Shaykhinurovich · 1998 · Candidate of Sciences

   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
3. Development of design and technological methods for creating high-quality silicon microelectronics products

   Niskov, Valeriy Yakovlevich · 1997 · Doctor of Sciences

   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
4. Films of HTSC materials: Preparation methods, structural features, superconducting properties, and applications in microelectronics

   Il'yushechkin, Aleksandr Yur'yevich · 1997 · Candidate of Sciences

   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
5. Spatiotemporal modulation of X-ray radiation

   Shchelokov, Igor Alexandrovich · 1997 · Candidate of Sciences

   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
6. Spectral and dynamic characteristics of the emission of injection lasers and superluminescent diodes based on quantum-size heterostructures

   Shramenko, Mikhail Vasil'yevich · 1997 · Candidate of Sciences

   • 05.27.03 Quantum electronics
7. Theoretical study of deep anisotropic etching of silicon structures in low-temperature plasma

   Lukichev, Vladimir Fedorovich · 1997 · Doctor of Sciences

   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
8. Pyroelectric thin films and their application in multielement integrated detectors

   Pevtsov, Yevgeniy Filippovich · 1997 · Candidate of Sciences

   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
9. Silicon integrated sensors of the magnetic field induction vector

   Romanov, Igor Mikhailovich · 1997 · Candidate of Sciences

   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
10. Ensuring the quality of microjunctions in semiconductor devices during their development and series production

    Zenin, Viktor Vasilyevich · 1997 · Doctor of Sciences

    • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
11. Frequency properties and characteristics of reverse-biased switching pin-diode structures

    Drozdovskaya, Lyudmila Mikhaylovna · 1997 · Candidate of Sciences

    • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
12. Development of lithographic methods and special equipment for creating VLSI and transistor structures with submicron element dimensions

    Krivospitskiy, Anatoliy Dmitrievich · 1997 · Doctor of Sciences

    • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
13. Physico-technological principles and methods for ensuring the quality of mass-produced CMOS VLSI

    Krasnikov, Gennadiy Yakovlevich · 1996 · Doctor of Sciences

    • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
14. Improving the reliability of integrated circuits in serial production by the leveling technology method

    Korolev, Sergey Yuryevich · 1996 · Candidate of Sciences

    • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
15. Simulation of electronic processes in ultra-high-speed bipolar heterostructure transistors

    Kul'kova, Elena Yur'yevna · 1996 · Candidate of Sciences

    • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
16. Investigation of the physicochemical processes of particle generation and loss in the plasma of an RF discharge in an industrial-type planar plasma-chemical etching reactor

    Pashkov, Vladimir Yur'yevich · 1996 · Candidate of Sciences

    • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
17. Development and study of integrated multiplexers designed for operation at low temperatures

    Bokk, Nikolay Eduardovich · 1996 · Candidate of Sciences

    • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
18. Optical holographic elements based on waveguide holograms for visual information display systems

    Chernopyatov, Aleksandr Viktorovich · 1996 · Candidate of Sciences

    • 05.27.03 Quantum electronics
19. Reconstruction of the surface microrelief and the composition of near-surface layers of microelectronics objects from the X-ray fluorescence signal

    Chukalina, Marina Valerevna · 1996 · Candidate of Sciences

    • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
20. System of structural elements and their interaction in digital integrated circuits based on gallium arsenide

    Adamov, Yuriy Fedorovich · 1996 · Doctor of Sciences

    • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices