Reconstruction of the surface microrelief and the composition of near-surface layers of microelectronics objects from the X-ray fluorescence signal

Chernogolovka

102 pp.

Keywords

microelectronics

Reconstruction of the surface microrelief and the composition of near-surface layers of microelectronics objects from the X-ray fluorescence signal — Chukalina, Marina Valerevna — 1996 — Russian Dissertation Library