Study of temperature fields, stresses, and defect formation in silicon IC structures during rapid thermal processing with incoherent radiation

More works in this specialty

1. Formation of nanoscale coatings by polyion assembly and Langmuir-Blodgett methods and study of their electrophysical properties

   Yashchenok, Aleksey Mikhaylovich · 2007 · Candidate of Sciences

   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
2. Semiconductor microwave autodynes with a load varying over a wide range of values and their use in microwave interferometer circuits

   Postelga, Aleksandr Eduardovich · 2006 · Candidate of Sciences

   • 01.04.03 Radiophysics
   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
3. Diagnostic methods for assessing the quality and reliability of semiconductor devices using low-frequency noise

   Zharkikh, Aleksandr Petrovich · 2005 · Candidate of Sciences

   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
4. Method of reactive ion-beam synthesis of thin films directly from ion beams

   Shevchuk, Sergey Leonidovich · 2002 · Candidate of Sciences

   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
5. Theoretical and experimental investigation of the thermal oxidation process of silicon structures

   Zlotnikova, Irina Yakovlevna · 1995 · Candidate of Sciences

   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices

All works in this specialty