Study of process-induced yield losses of LSI circuits using electrical test structures

More works in this specialty

1. Diagnostic methods for assessing the quality and reliability of semiconductor devices using low-frequency noise

   Zharkikh, Aleksandr Petrovich · 2005 · Candidate of Sciences

   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
2. Method of reactive ion-beam synthesis of thin films directly from ion beams

   Shevchuk, Sergey Leonidovich · 2002 · Candidate of Sciences

   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
3. Electromagnetic interactions in the input circuits of high-power HF and microwave transistors and their power and frequency characteristics

   Bulgakov, Oleg Mitrofanovich · 1993 · Candidate of Sciences

   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
4. Process of forming a submicron pattern by projection photolithography for the fabrication of VLSI memory devices based on cylindrical magnetic domains

   Ostroverkh, V. A. · 1993 · Candidate of Sciences

   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
5. Effect of halogen implantation on the electrophysical properties and processes in single-crystal silicon

   Krasnobaev, Leonid Yakovlevich · 1992 · Candidate of Sciences

   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices

All works in this specialty