Cover of the work “Research and development of thin-film heterogeneous structures of sensitive elements of pressure sensors for extreme operating conditions”. Author: Gurin, Sergey Aleksandrovich. Degree: Candidate of Sciences. Year: 2016

Research and development of thin-film heterogeneous structures of sensitive elements of pressure sensors for extreme operating conditions

Saint Petersburg State Electrotechnical University 'LETI' named after V.I. Ulyanov (Lenin), Penza

156 pp.

Research and development of thin-film heterogeneous structures of sensitive elements of pressure sensors for extreme operating conditions — Gurin, Sergey Aleksandrovich — 2016 — Russian Dissertation Library