Modeling of aerothermodynamic processes in clean rooms in the production of integrated circuits

More works in this specialty

1. Computer simulation of the processes of propagation and deposition of aerosol particles in local clean volumes of microelectronics

   Zyuryukin, Andrey Viktorovich · 1996 · Candidate of Sciences

   • 05.27.07
2. Investigation and development of photoelectric devices for measuring the parameters of photomasks and film structures

   Ukhov, Andrey Aleksandrovich · 1995 · Candidate of Sciences

   • 05.27.07
3. Investigation and development of magnetron sputtering devices with efficient use of target material

   Chepakhin, V. G. · 1994 · Candidate of Sciences

   • 05.27.07
4. Development of methods for calculating the elements of recirculation loops in cleanrooms

   Ryabyshenkov, A. S. · 1994 · Candidate of Sciences

   • 05.27.07
5. Development of low-voltage electron-probe systems for nondestructive testing of local parameters of electronic devices

   Shakhbazov, S. Yu. · 1993 · Candidate of Sciences

   • 05.27.07