Investigation and development of photoelectric devices for measuring the parameters of photomasks and film structures

More works in this specialty

1. Investigation and development of magnetron sputtering devices with efficient use of target material

   Chepakhin, V. G. · 1994 · Candidate of Sciences

   • 05.27.07
2. Development of methods for calculating the elements of recirculation loops in cleanrooms

   Ryabyshenkov, A. S. · 1994 · Candidate of Sciences

   • 05.27.07
3. Development of low-voltage electron-probe systems for nondestructive testing of local parameters of electronic devices

   Shakhbazov, S. Yu. · 1993 · Candidate of Sciences

   • 05.27.07
4. Automated test bench for comprehensive monitoring of electromechanical parameters of small-sized stepping motors

   Zalivskiy, Igor Eduardovich · 1992 · Candidate of Sciences

   • 05.27.07
5. Systems for effective thermal imaging monitoring of high-temperature processes in the production of electronic engineering products

   Gaydukevich, Yuriy Cheslavovich · 1991 · Candidate of Sciences

   • 05.27.07