Investigation and development of magnetron sputtering devices with efficient use of target material

More works in this specialty

1. Development of methods for the calculation and design of manipulators for cleanrooms

   Merkushev, Oleg Mikhailovich · 1997 · Candidate of Sciences

   • 05.27.07
2. Modeling of aerothermodynamic processes in clean rooms in the production of integrated circuits

   Tereshchenko, Anatoliy Mikhaylovich · 1996 · Doctor of Sciences

   • 05.27.07
3. Computer simulation of the processes of propagation and deposition of aerosol particles in local clean volumes of microelectronics

   Zyuryukin, Andrey Viktorovich · 1996 · Candidate of Sciences

   • 05.27.07
4. Investigation and development of photoelectric devices for measuring the parameters of photomasks and film structures

   Ukhov, Andrey Aleksandrovich · 1995 · Candidate of Sciences

   • 05.27.07
5. Development of methods for calculating the elements of recirculation loops in cleanrooms

   Ryabyshenkov, A. S. · 1994 · Candidate of Sciences

   • 05.27.07