Investigation of X-ray lithographic processes and development of equipment for producing structures of submicron size

More works in this specialty

1. Study of the process and development of an installation for the finishing treatment of microdevices with a flow of solid particles

   Ugolnikov, Sergei Viktorovich · 1998 · Candidate of Sciences

   • 05.27.07
2. Development of methods for the calculation and design of manipulators for cleanrooms

   Merkushev, Oleg Mikhailovich · 1997 · Candidate of Sciences

   • 05.27.07
3. Modeling of aerothermodynamic processes in clean rooms in the production of integrated circuits

   Tereshchenko, Anatoliy Mikhaylovich · 1996 · Doctor of Sciences

   • 05.27.07
4. Computer simulation of the processes of propagation and deposition of aerosol particles in local clean volumes of microelectronics

   Zyuryukin, Andrey Viktorovich · 1996 · Candidate of Sciences

   • 05.27.07
5. Investigation and development of photoelectric devices for measuring the parameters of photomasks and film structures

   Ukhov, Andrey Aleksandrovich · 1995 · Candidate of Sciences

   • 05.27.07