Cover of the work “Improvement of the technology for fabricating micro- and nanoelectronics devices using non-equilibrium low-pressure microwave plasma”. Author: Shanygin, Vitaly Yakovlevich. Degree: Candidate of Sciences. Year: 2015

Improvement of the technology for fabricating micro- and nanoelectronics devices using non-equilibrium low-pressure microwave plasma

Yuri Gagarin State Technical University of Saratov, Saratov

144 pp.

Improvement of the technology for fabricating micro- and nanoelectronics devices using non-equilibrium low-pressure microwave plasma — Shanygin, Vitaly Yakovlevich — 2015 — Russian Dissertation Library