Improvement of the technology for fabricating micro- and nanoelectronics devices using non-equilibrium low-pressure microwave plasma
Shanygin, Vitaly Yakovlevich, 2015, Candidate of Sciences dissertation
- 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
- 05.09.10 Electrotechnology
Yuri Gagarin State Technical University of Saratov, Saratov
144 pp.
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