Cover of the work “Study of heteroepitaxial growth of 3C-SiC films on silicon from solid-phase sources by the chemical gas-transport method and creation of thermal transducers based on them”. Author: Atadzhanov, Shavkat Razhabovich. Degree: Candidate of Sciences. Year: 1997

Study of heteroepitaxial growth of 3C-SiC films on silicon from solid-phase sources by the chemical gas-transport method and creation of thermal transducers based on them

Samara

153 pp.

Study of heteroepitaxial growth of 3C-SiC films on silicon from solid-phase sources by the chemical gas-transport method and creation of thermal transducers based on them — Atadzhanov, Shavkat Razhabovich — 1997 — Russian Dissertation Library