Study of heteroepitaxial growth of 3C-SiC films on silicon from solid-phase sources by the chemical gas-transport method and creation of thermal transducers based on them
Atadzhanov, Shavkat Razhabovich, 1997, Candidate of Sciences dissertation
Study of heteroepitaxial growth of 3C-SiC films on silicon from solid-phase sources by the chemical gas-transport method and creation of thermal transducers based on them — Atadzhanov, Shavkat Razhabovich — 1997 — Russian Dissertation Library