Cover of the work “Structural features of thin SiC films formed by pulsed laser deposition on Si and Al2O3 substrates”. Author: Ryndia, Sergei Mikhailovich. Degree: Candidate of Sciences. Year: 2014

Structural features of thin SiC films formed by pulsed laser deposition on Si and Al2O3 substrates

L. Ya. Karpov Research Institute of Physical Chemistry, Moscow

158 pp.

Structural features of thin SiC films formed by pulsed laser deposition on Si and Al2O3 substrates — Ryndia, Sergei Mikhailovich — 2014 — Russian Dissertation Library