Cover of the work “Sputtering and modification of the surface of materials by ions of multicomponent beams with a wide energy spectrum”. Author: Volkov, Nikolai Viktorovich. Degree: Doctor of Sciences. Year: 2015

Sputtering and modification of the surface of materials by ions of multicomponent beams with a wide energy spectrum

National Research Nuclear University, Moscow

405 pp.

Sputtering and modification of the surface of materials by ions of multicomponent beams with a wide energy spectrum — Volkov, Nikolai Viktorovich — 2015 — Russian Dissertation Library