Russian Dissertation Library

Preparation of amorphous and microcrystalline thin-film materials a-Si1-xCx:H, μc-Si:H and investigation of the properties of films and device structures based on them

Mavlyanov, Ravshan Karshibaevich, 1996, Candidate of Sciences dissertation

Saint Petersburg

163 pp.

Keywords

thin-film materials

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Preparation of amorphous and microcrystalline thin-film materials a-Si1-xCx:H, μc-Si:H and investigation of the properties of films and device structures based on them — Mavlyanov, Ravshan Karshibaevich — 1996 — Russian Dissertation Library