Peculiarities of microdefects in silicon single crystals grown by the Czochralski method revealed by X-ray diffuse scattering

Moscow

131 pp.

Keywords

microdefects; silicon single crystals

Peculiarities of microdefects in silicon single crystals grown by the Czochralski method revealed by X-ray diffuse scattering — Zotov, Nikolai Mikhailovich — 1997 — Russian Dissertation Library