Diagnostics of large-scale impurity clusters in semiconductors and analysis of such clusters in Czochralski-grown silicon

Moscow

129 pp.

Keywords

semiconductors, silicon, Czochralski method

Diagnostics of large-scale impurity clusters in semiconductors and analysis of such clusters in Czochralski-grown silicon — Murin, Dmitriy Igorevich — 1996 — Russian Dissertation Library