Component base and manufacturing technology of silicon microelectromechanical systems

More works in this specialty

1. Formation of nanoscale coatings by polyion assembly and Langmuir-Blodgett methods and study of their electrophysical properties

   Yashchenok, Aleksey Mikhaylovich · 2007 · Candidate of Sciences

   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
2. Semiconductor microwave autodynes with a load varying over a wide range of values and their use in microwave interferometer circuits

   Postelga, Aleksandr Eduardovich · 2006 · Candidate of Sciences

   • 01.04.03 Radiophysics
   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
3. Diagnostic methods for assessing the quality and reliability of semiconductor devices using low-frequency noise

   Zharkikh, Aleksandr Petrovich · 2005 · Candidate of Sciences

   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
4. Method of reactive ion-beam synthesis of thin films directly from ion beams

   Shevchuk, Sergey Leonidovich · 2002 · Candidate of Sciences

   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
5. Self-organization of multilayer metallization structures for contact systems of sub-100 nm CMOS integrated circuits

   Khorin, Ivan Anatol'yevich · 2002 · Candidate of Sciences

   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices

All works in this specialty