Cover of the work “Self-organization of multilayer metallization structures for contact systems of sub-100 nm CMOS integrated circuits”. Author: Khorin, Ivan Anatol'yevich. Degree: Candidate of Sciences. Year: 2002

Self-organization of multilayer metallization structures for contact systems of sub-100 nm CMOS integrated circuits

Moscow

171 pp.

Self-organization of multilayer metallization structures for contact systems of sub-100 nm CMOS integrated circuits — Khorin, Ivan Anatol'yevich — 2002 — Russian Dissertation Library