Russian Dissertation Library

Theoretical and experimental investigations of the diffusion of boron and phosphorus in the near-surface region of ion-implanted silicon

Bodnar', Oleg Borisovich, 1997, Candidate of Sciences dissertation

Moscow

96 pp.

Keywords

diffusion of boron and phosphorus

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Theoretical and experimental investigations of the diffusion of boron and phosphorus in the near-surface region of ion-implanted silicon — Bodnar', Oleg Borisovich — 1997 — Russian Dissertation Library