Cover of the work “Study of sputtering mechanisms of two-component targets using computer simulation methods”. Author: Tatur, Andrey Eduardovich. Degree: Candidate of Sciences. Year: 1998

Study of sputtering mechanisms of two-component targets using computer simulation methods

Moscow

182 pp.

Study of sputtering mechanisms of two-component targets using computer simulation methods — Tatur, Andrey Eduardovich — 1998 — Russian Dissertation Library