Cover of the work “Structure of a non-sputtering magnetron discharge”. Author: Kaziev, Andrey Viktorovich. Degree: Candidate of Sciences. Year: 2014

Structure of a non-sputtering magnetron discharge

National Research Nuclear University, Moscow

152 pp.

Structure of a non-sputtering magnetron discharge — Kaziev, Andrey Viktorovich — 2014 — Russian Dissertation Library