Research and development of a technological process for nondestructive testing of resistive layers in order to analyze the integral parameters of their state required for the automation and modeling of the stages of the photolithographic process

Moscow

210 pp.

Research and development of a technological process for nondestructive testing of resistive layers in order to analyze the integral parameters of their state required for the automation and modeling of the stages of the photolithographic process — Shapiro, Aleksandr Girshevich — 1990 — Russian Dissertation Library