Cover of the work “Plasma sources of sputtering ions based on open low-pressure discharges in a magnetic field with a cold cathode”. Author: Shulunov, Vyacheslav Rubinovich. Degree: Candidate of Sciences. Year: 2002

Plasma sources of sputtering ions based on open low-pressure discharges in a magnetic field with a cold cathode

Ulan-Ude

127 pp.

Plasma sources of sputtering ions based on open low-pressure discharges in a magnetic field with a cold cathode — Shulunov, Vyacheslav Rubinovich — 2002 — Russian Dissertation Library