Physicochemical fundamentals of deposition of tungsten alloys with transition metals of groups V-VII from a vapor-gas mixture of their fluorides with hydrogen

Moscow

332 pp.

Keywords

deposition of tungsten alloys

Physicochemical fundamentals of deposition of tungsten alloys with transition metals of groups V-VII from a vapor-gas mixture of their fluorides with hydrogen — Lakhotkin, Yury Viktorovich — 1994 — Russian Dissertation Library