Russian Dissertation Library
Cover of the work “Physical mechanism of the formation of the electron energy spectrum of the near-electrode plasma of a low-pressure capacitive RF discharge”. Author: Singaevskiy, Igor Fedorovich. Degree: Candidate of Sciences. Year: 1998

Physical mechanism of the formation of the electron energy spectrum of the near-electrode plasma of a low-pressure capacitive RF discharge

Singaevskiy, Igor Fedorovich, 1998, Candidate of Sciences dissertation

Moscow

192 pp.

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Physical mechanism of the formation of the electron energy spectrum of the near-electrode plasma of a low-pressure capacitive RF discharge — Singaevskiy, Igor Fedorovich — 1998 — Russian Dissertation Library