Cover of the work “Multilayer absorption filters for astronomy and projection lithography in the extreme ultraviolet range”. Author: Tsybin, Nikolai Nikolaevich. Degree: Candidate of Sciences. Year: 2015

Multilayer absorption filters for astronomy and projection lithography in the extreme ultraviolet range

Institute for Physics of Microstructures of the Russian Academy of Sciences, Nizhny Novgorod

144 pp.

Multilayer absorption filters for astronomy and projection lithography in the extreme ultraviolet range — Tsybin, Nikolai Nikolaevich — 2015 — Russian Dissertation Library