Cover of the work “Modeling of the deposition process and development of a method for monitoring gradient films during deposition”. Author: Kim Chong Sup. Degree: Candidate of Sciences. Year: 1998

Modeling of the deposition process and development of a method for monitoring gradient films during deposition

Saint Petersburg

112 pp.

Modeling of the deposition process and development of a method for monitoring gradient films during deposition — Kim Chong Sup — 1998 — Russian Dissertation Library