Cover of the work “Methods for controlling the operating modes of diffusion installations and for quality control of topologies in micro- and nanoelectronics”. Author: Ye Tun Teyn. Degree: Candidate of Sciences. Year: 2014

Methods for controlling the operating modes of diffusion installations and for quality control of topologies in micro- and nanoelectronics

National Research University of Electronic Technology (MIET), Moscow

138 pp.

Methods for controlling the operating modes of diffusion installations and for quality control of topologies in micro- and nanoelectronics — Ye Tun Teyn — 2014 — Russian Dissertation Library