Cover of the work “Mathematical modeling of high-frequency plasma treatment of solids at reduced pressure”. Author: Zheltukhin, Viktor Semenovich. Degree: Doctor of Sciences. Year: 2003

Mathematical modeling of high-frequency plasma treatment of solids at reduced pressure

Kazan

278 pp.

Mathematical modeling of high-frequency plasma treatment of solids at reduced pressure — Zheltukhin, Viktor Semenovich — 2003 — Russian Dissertation Library