Cover of the work “Kinetics of the interaction of nonequilibrium chlorine plasma and chlorine mixtures with argon, nitrogen, oxygen, and hydrogen with silicon, gallium arsenide, and copper”. Author: Ovchinnikov, Nikolay Lvovich. Degree: Candidate of Sciences. Year: 1997

Kinetics of the interaction of nonequilibrium chlorine plasma and chlorine mixtures with argon, nitrogen, oxygen, and hydrogen with silicon, gallium arsenide, and copper

Ivanovo

149 pp.

Kinetics of the interaction of nonequilibrium chlorine plasma and chlorine mixtures with argon, nitrogen, oxygen, and hydrogen with silicon, gallium arsenide, and copper — Ovchinnikov, Nikolay Lvovich — 1997 — Russian Dissertation Library