Cover of the work “Investigation and modeling of the processes of electron beam formation and their interaction with the surface of solids as a basis for the development of precision electron-beam processing equipment”. Author: Filachev, Anatoliy Mikhaylovich. Degree: Doctor of Sciences. Year: 1997

Investigation and modeling of the processes of electron beam formation and their interaction with the surface of solids as a basis for the development of precision electron-beam processing equipment

Moscow

55 pp.

Investigation and modeling of the processes of electron beam formation and their interaction with the surface of solids as a basis for the development of precision electron-beam processing equipment — Filachev, Anatoliy Mikhaylovich — 1997 — Russian Dissertation Library