Improving the machining accuracy of 150-mm-diameter silicon wafers in lapping and polishing operations under series production conditions
Shulga, V. G., 1995, Candidate of Sciences dissertation
Moscow
195 pp.
More works in this specialty
- Study of the processes and development of a technology for forming multifunctional coatings by micro-arc oxidation on titanium alloys in instrument making
Zhukov, Sergei Vladimirovich · 2009 · Candidate of Sciences · Russian State Technological University named after K. E. Tsiolkovsky (MATI)
- Analysis and study of the design and manufacturing technology of a medical endoscope with the aim of improving its quality
Khrabrov, Sergey Vasilyevich · 1994 · Candidate of Sciences
- Investigation of technological methods for ensuring hermeticity of electronic devices in metal-glass packages
Zhuravleva, L. V. · 1993 · Candidate of Sciences
- Improvement of the quality indicators of the surface layer of instrument-making plates made of brittle materials during lapping with free abrasive
Mashchanov, Kuandyk Zhusupovich · 1991 · Candidate of Sciences
- Improving the efficiency of robotic technological processes for cleaning instrument parts
Chadin, Aleksandr Nikolaevich · 1990 · Candidate of Sciences