Cover of the work “Improving the energy efficiency of air preparation and distribution systems of cleanrooms”. Author: Chernyakov, Evgeny Vadimovich. Degree: Candidate of Sciences. Year: 2014

Improving the energy efficiency of air preparation and distribution systems of cleanrooms

Saint Petersburg State University of Architecture and Civil Engineering, Stavropol

165 pp.

Keywords

clean production rooms, semiconductor industry

Improving the energy efficiency of air preparation and distribution systems of cleanrooms — Chernyakov, Evgeny Vadimovich — 2014 — Russian Dissertation Library