Russian Dissertation Library
Cover of the work “Implantation of silicon with high doses of carbon: structural features and phase transformations”. Author: Nusupov, Kair Khamzaevich. Degree: Doctor of Sciences. Year: 1995

Implantation of silicon with high doses of carbon: structural features and phase transformations

Nusupov, Kair Khamzaevich, 1995, Doctor of Sciences dissertation

Almaty

294 pp.

Keywords

silicon implantation; high doses of carbon

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Implantation of silicon with high doses of carbon: structural features and phase transformations — Nusupov, Kair Khamzaevich — 1995 — Russian Dissertation Library