Experimental study of low-temperature plasma parameters in plasma-chemical reactors for micro- and nanoelectronics
Sukhanov, Yakov Nikolaevich, 2005, Candidate of Sciences dissertation
Moscow
114 pp.
More works in this specialty
- Investigation of the effect of small gas admixtures and a constant electric field on the parameters of a strongly nonuniform reduced-pressure microwave discharge by mathematical modeling
Titov, Aleksandr Yur'evich · Candidate of Sciences · Lomonosov Moscow State University (MSU)
- Scattering and absorption of high-power laser radiation in low-density porous media of various microstructures
Yankovsky, Georgiy Markovich · 2006 · Candidate of Sciences
- Modeling of the argon-silane plasma of a VHF discharge
Khudaybergenov, Gamzat Zhaparovich · 2003 · Candidate of Sciences
- High-frequency ion source for active particle diagnostics of plasma
Shikhovtsev, Igor Vladimirovich · 2002 · Candidate of Sciences
- Scattering and sputtering of particles in the bombardment of solids by atoms, molecules, and clusters
Shulga, Vladimir Ivanovich · 2002 · Doctor of Sciences