Cover of the work “Diagnostics of semiconductor structures by electrochemical capacitance-voltage profiling”. Author: Frolov, Dmitriy Sergeyevich. Degree: Candidate of Sciences. Year: 2016

Diagnostics of semiconductor structures by electrochemical capacitance-voltage profiling

Saint Petersburg State Electrotechnical University (LETI), Saint Petersburg

151 pp.

Keywords

electrochemical capacitance-voltage profiling of semiconductors