Cover of the work “Development of a control system for the process of charged particle beam formation in ion-plasma deposition problems”. Author: Tsaregorodtsev, Anatoliy Valeryevich. Degree: Candidate of Sciences. Year: 1999

Development of a control system for the process of charged particle beam formation in ion-plasma deposition problems

Moscow

160 pp.

Development of a control system for the process of charged particle beam formation in ion-plasma deposition problems — Tsaregorodtsev, Anatoliy Valeryevich — 1999 — Russian Dissertation Library