Cover of the work “Automation of continuous photometric monitoring of the deposition and etching rates of thin dielectric films”. Author: Semenova, Svetlana Ernstovna. Degree: Candidate of Sciences. Year: 2003

Automation of continuous photometric monitoring of the deposition and etching rates of thin dielectric films

Rybinsk

165 pp.

Keywords

deposition of dielectric films, etching of thin dielectric films

Automation of continuous photometric monitoring of the deposition and etching rates of thin dielectric films — Semenova, Svetlana Ernstovna — 2003 — Russian Dissertation Library