Russian Dissertation Library

Application of mathematical models for selecting optimal control parameters of the technological process of post-implantation annealing of semiconductor structures : using InSb as an example

Naumenko, Elvira Vyacheslavovna, 1997, Candidate of Sciences dissertation

  • 05.13.16

Moscow

101 pp.

Keywords

technological processes, semiconductor structures

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Application of mathematical models for selecting optimal control parameters of the technological process of post-implantation annealing of semiconductor structures : using InSb as an example — Naumenko, Elvira Vyacheslavovna — 1997 — Russian Dissertation Library