Electronic component base of micro- and nanoelectronics, quantum devices

code 2.2.2. • before 2022: 05.27.01 “Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices”; 05.27.03 “Quantum electronics”

1. Modeling of structure-dependent technological processes of formation and characteristics of a polysilicon MIS transistor

   Zinnurova, Elvira Zulfakarovna · 1992 · Candidate of Sciences

   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
2. Crystal growth, structural features, and physical properties of epitaxial combinations of silicon, calcium fluoride, and cobalt disilicide

   Zhirnov, Viktor Vladimirovich · 1992 · Candidate of Sciences

   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
3. Research and development of integrated humidity transducers for monitoring process media in microelectronics

   Yaryshevskiy, Mikhail Anatolyevich · 1991 · Candidate of Sciences

   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
4. Degradation mechanisms of silicon IMPATT and p-i-n diodes and methods for monitoring their quality

   Shcherbina, Lyudmila Viktorovna · 1991 · Candidate of Sciences

   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
5. Ellipsometric method for monitoring the parameters of complex dielectric structures

   Shchapova, Irina Anatolyevna · 1991 · Candidate of Sciences

   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
6. Steady-state and pulsed annealing of thin films

   Chaplanov, Arkady Mikhaylovich · 1991 · Doctor of Sciences

   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
7. Development of integrated sorption humidity and temperature transducers for monitoring the atmosphere in integrated circuit packages and of methods for determining the thermal resistance of packages and the moisture content in their internal volume

   Chernyshov, Aleksandr Anatol'evich · 1991 · Candidate of Sciences

   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices
8. Deposition of dielectric films by the dynamic plasma processing method for applications in electronics

   Tsvetkova, Yuliya Vladimirovna · 1991 · Candidate of Sciences

   • 05.27.01 Solid-state electronics, radio-electronic components, micro- and nanoelectronics, quantum-effect devices